Processing of Nanosensors Using a Sacrificial Template Approach

A new microsensor fabrication approach has been demonstrated based upon the use of nanostructures as templates. The fundamental idea is that existing nanostructures, such as carbon nano tubes or biological structures, have a material structure that can be used advantageously in order to provide new sensor systems but lack the advantages of some materials to, for example, operate at high temperatures. The approach is to start with a template using nanostructures such as a carbon nanotube. This template can then be coated by an oxide material with higher temperature capabilities. Upon heating in air, the carbon nanotube template is burned off, leaving only the metal oxide nanostructure. The resulting structure has a combination of the crystal structure and surface morphology of the carbon nanotube, combined with the material durability and hightemperature- sensing properties of the metal oxide. Further, since the metal oxide nanocrystals are deposited on the carbon nanotube, after burn-off what is left is a metal oxide porous nanostructure. This makes both the interior and the exterior of this nano structured sensor available for gas species detection. This, in effect, increases the surface area available for sensing, which has been shown in the past to significantly increase sensor performance.