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Status of Multi-Beam Long Trace- Profiler DevelopmentA multi-beam LTP is under development at MSFC in collaboration with Lawrence Berkeley National laboratory and Brookhaven National Laboratory. The Multi-beam LTP has been fully assembled. First tests of the MBLTP has demonstrated the feasibility of the multibeam approach. The calibrations are under way. The MBLTP is intended to be used for metrology support of the deterministic polishing experiments.
Document ID
20140003110
Acquisition Source
Marshall Space Flight Center
Document Type
Conference Paper
Authors
Gubarev, Mikhail V. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Kilaru, Kiranmayee (NASA Marshall Space Flight Center Huntsville, AL, United States)
Merthe, Daniel J. (California Univ., Lawrence Berkeley National Lab. Berkeley, CA, United States)
Kester, Thomas (NASA Marshall Space Flight Center Huntsville, AL, United States)
McKinney, Wayne R. (California Univ., Lawrence Berkeley National Lab. Berkeley, CA, United States)
Takacs, Peter Z. (Brookhaven National Lab. Upton, NY, United States)
Eng, Ron (NASA Marshall Space Flight Center Huntsville, AL, United States)
Dahir, Andrew (Texas A&M Univ. Commerce, TX, United States)
Yashchuk, Valeriy V. (California Univ., Lawrence Berkeley National Lab. Berkeley, CA, United States)
Date Acquired
April 16, 2014
Publication Date
August 25, 2013
Subject Category
Instrumentation And Photography
Optics
Report/Patent Number
M13-2952
Report Number: M13-2952
Meeting Information
Meeting: The International Society of Optics and Photonics Optics + Photonics 2013 Conference-Advances in X-Ray/EUV Optics and Components
Location: San Diego, CA
Country: United States
Start Date: August 25, 2013
End Date: August 29, 2013
Sponsors: International Society for Optical Engineering
Distribution Limits
Public
Copyright
Public Use Permitted.

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