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Piezoelectric Resonator with Two LayersA piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top layer and a second one of the electrodes in the bottom layer are coupled to a second contact.
Document ID
20140016620
Acquisition Source
Johnson Space Center
Document Type
Other - Patent
Authors
Stephanou, Philip J.
Black, Justin P.
Date Acquired
November 21, 2014
Publication Date
August 20, 2013
Subject Category
Electronics And Electrical Engineering
Solid-State Physics
Report/Patent Number
Patent Application Number: US-Patent-Appl-SN-12/456,245
Patent Number: US-Patent-8,513,863
Funding Number(s)
CONTRACT_GRANT: NNJ07JB04C
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-Patent-8,513,863
Patent Application
US-Patent-Appl-SN-12/456,245
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