Secondary Ion Mass Spectroscopy

Secondary Ion mass Spectroscopy (SIMS), as the name suggests, involves characterizing metallic and other materials trough the spectroscopic analysis of secondary ions emanating from the surface of the material to be characterized by the impact of the high energy primary ions. The primary ion source including the choice of its gun, voltage and current can be selected and used depending on the purpose of the analysis. In most instruments more than one primary ion gun is lined up to the sample stage and can be activated with selected accelerating parameters (voltage and beam intensity). The impingement of primary ions on to the sample surface generates positive, negative or neutral ions, electrons, atoms and atomic clusters. Majority of these sample fragments being neutral, could not be utilized as such fragments cannot be manipulated through the use of electromagnetic or electrostatic lenses. Secondary ions that are positively or negatively charged possess large variation in velocity, charge, and mass. These ionic fragments eventually travel through a system of several lenses in very high vacuum to reach detector/counter. Relative amounts of alloying elements or impurities in an alloy can be calculated from the counts of related ions accumulated in the detector/counter.