Acquisition Source
Goddard Space Flight Center
Document Type
Accepted Manuscript (Version with final changes)
Authors
M. J. Li
(Goddard Space Flight Center Greenbelt, Maryland, United States) R. P. Brekosky (Science Systems and Applications (United States) Lanham, Maryland, United States) D. E. Burns
(Langley Research Center Hampton, Virginia, United States) A. Carter (Johns Hopkins University Baltimore, Maryland, United States) M. P. Chang
(Goddard Space Flight Center Greenbelt, Maryland, United States) N. P. Costen (Jacobs (United States) Dallas, Texas, United States) R. K. Fettig (Beacon Inc.) D. E. Franz
(Goddard Space Flight Center Greenbelt, Maryland, United States) M. A. Greenhouse (Goddard Space Flight Center Greenbelt, Maryland, United States) G. Hu (Science Systems and Applications (United States) Lanham, Maryland, United States) K. Kim
(Science Systems and Applications (United States) Lanham, Maryland, United States) D. P. Kelly (Goddard Space Flight Center Greenbelt, Maryland, United States) C. A. Kotecki (Goddard Space Flight Center Greenbelt, Maryland, United States) A. S. Kutyrev (University of Maryland, College Park College Park, Maryland, United States) S. R. McCandliss (Johns Hopkins University Baltimore, Maryland, United States) T. M. Miller (Goddard Space Flight Center Greenbelt, Maryland, United States) S. H. Moseley (Quantum Circuits Inc.) L. Oh (Johns Hopkins University Applied Physics Laboratory North Laurel, Maryland, United States) S. Rodriguez (AS and D, Inc.) F. Wang (Goddard Space Flight Center Greenbelt, Maryland, United States) B. Welch (Johns Hopkins University Baltimore, Maryland, United States) Date Acquired
May 6, 2020
Publication Date
July 8, 2020
Publication Information
Publication: Journal of Microelectromechanical Systems
Publisher: IEEE
Volume: 29
Issue: 5
Issue Publication Date: October 1, 2020
ISSN: 1057-7157
e-ISSN: 1941-0158
Funding Number(s)
WBS: 141108.04.02.01.39
CONTRACT_GRANT: 80NSSC19K1040
CONTRACT_GRANT: NNX17AC26G
Distribution Limits
Public
Copyright
Portions of document may include copyright protected material.
Technical Review
External Peer Committee