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Metrology for Spatial InterferometryThe accuracy of the relative metrology gauge developed for the proposed OSI and SONATA missions is improved to sub-picometer level.
Document ID
20210001254
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
Authors
Gursel, Y.
Date Acquired
March 13, 1994
Publication Date
March 13, 1994
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
surface
metrology
gauge

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