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Fabricating Sub-collimating Grids for an X-ray Solar Imaging Spectrometer using LIGA TechniquesThis paper describes fabrication of sub-collimating X-ray grids that are used in an instrument for the High Energy Solar Spectroscopic Imager ( HESSI ), a proposed NASA mission that will promote understanding of solar particle acceleration and explosive energy release in the magnetized plasmas at the Sun. The HESSI comprises 12 rotating pairs of high-aspect-ratio, high-Z grids; each pair is separated by 1.7 meters and backed by a single Ge detector.
Document ID
20210001605
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
Authors
Malek, C.
Jackson, K.
Kenny, T.
Stowe, T.
Scholz, M.
Hruby, J.
Bonivert, W.
Manion, S.
Wiberg, D.
Hecht, M.
Brennan, R.
Date Acquired
January 1, 1995
Publication Date
January 1, 1995
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
x-ray
collimators
x-ray
grids
thick
films
high
aspect
ratio
structures
MEMS
electroplating
LIGA
x-ray
lithography
deep
etch
x-ray
lithography

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