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Effects of Hydrogen on Tantalum Nitride ResistorsUNKNOWN
Document ID
20210002840
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/17209
Authors
Weiler, J.
Date Acquired
May 12, 1999
Publication Date
May 12, 1999
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
hydrogen
tantalum
nitride
hybrid
microelectronics
palladium

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