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MEMS Micro Valve for Space ApplicationsWe report on the development of silicon micro valves for micro-propulsion and other space applications here at JPL.
Document ID
20210002984
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/17838
Authors
Mueller, J.
Tang, W.
Bame, D.
Chakraborty, I.
Date Acquired
September 28, 1999
Publication Date
September 28, 1999
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
valves
MEMS
Piezoelectric

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