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Reliability Issues of COTS MEMS for Aerospace ApplicationsThis paper reviews the current status of MEMS packaging technology from COTS to specific application provides lessons learned, and finally, identifies a need for systematic approach for this purpose.
Document ID
20210003293
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/17737
Authors
Kim, N.
Ghaffarian, R.
Ramesham, R.
Date Acquired
January 1, 1999
Publication Date
January 1, 1999
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
Commercial-Off-The-Shelf
COTS
Microelectromechanical
Systems
MEMS
Reliability
Pressure
sensors
accelerometer
aerospace
environment

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