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Non-Destructive Measurements for CMOS Devices Using Charge Collection TechniquesUNKNOWN
Document ID
20210003674
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/24324
Authors
Johnston, Allan
Swift, Gary
Edmonds, Larry
Date Acquired
July 15, 1996
Publication Date
July 15, 1996
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
device
overlayer
epi
thickness
diffusion
lengthCMOS
RAM
charge
collection
spectroscopy

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