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MEMS Micro Valve for Space ApplicationsWe report on the development of a Micro-Electro-Mechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of the planet, or micro-fluidics experiments in micro-gravity.
Document ID
20210003703
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/17516
Authors
Tang, T.
Bame, D.
Tang, W.
Chakraborty,I.
Date Acquired
June 7, 1999
Publication Date
June 7, 1999
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
MEMS
Valves
Space

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