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Interferometric Optical Filters Utilizing Metal Patterns on Free-Standing Thin SubstratesA new technology for infrared optical filters is presented. We have produced a bandpass filter consisting of a thin Si wafer with cross-shaped metal patterns deposited on both sides.
Document ID
20210004308
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/33775
Authors
George, T.
Pike, W.
Muller, R.
Maker, P.
Fathauer, R.
Ksendzov, A.
Date Acquired
July 24, 1994
Publication Date
July 24, 1994
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
infrared
optical
filters
band-pass
filter
electron-beam
lithography
interferometric
filters

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