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Total Dose Effects on Microelectromechanical Systems (MEMS): AccelerometersMicroelectromechanical sensors, ADXL50 and XMMAS40G accelerometers, which are fabricated with surface micromachining techniques are characterized for total dose radiation. An unusual failure mechanism that appears to be associated with the sensor was observed and presented in this paper.
Document ID
20210004999
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/26070
Authors
Lyke, J.
Barnes, C. E.
Tang, W. C.
Johnston, A. H.
Lee, C. I.
Date Acquired
July 15, 1996
Publication Date
July 15, 1996
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
mems
microelectromechanical
systems
new
technology

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