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Radiation Response of a MEMS Accelerometer: An Electrostatic ForceParticle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage.
Document ID
20210005585
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other
External Source(s)
hdl:2014/20295
Authors
Swift, G. M.
Lee, C. I.
Edmonds, L. D.
Date Acquired
July 20, 1998
Publication Date
July 20, 1998
Publication Information
Publisher: UNKNOWN
Distribution Limits
Public
Copyright
Other
Technical Review
Keywords
Particle
irradiation
electrostatic
force
microelectromechanical
system
MEMS

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