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Characterizations of Optimized Microshutter Arrays for Space Borne Observatory ApplicationsWe report the latest design, fabrication, and characterization result of the Next-Generation Microshutter Arrays (NGMSA) for space borne observatory applications. Our improved blade design aims to reduce the counter torque induced by the potential on the opposing wall to eliminate the torque bump, and thus enables pure electrostatic actuation for more reliable and stable microshutter operations. This paper presents the experimental performances of micro-fabricated microshutter arrays with varying design parameters and compares the results with simulation predictions.
Document ID
20210024056
Acquisition Source
Goddard Space Flight Center
Document Type
Conference Paper
Authors
Kyowon Kim (Science Systems and Applications (United States) Lanham, Maryland, United States)
Ming Ke (University of California, Los Angeles Los Angeles, California, United States)
Matthew A Greenhouse (Goddard Space Flight Center Greenbelt, Maryland, United States)
Alexander S Kutyrev (University of Maryland, College Park College Park, Maryland, United States)
Rainer Fettig (Beacon System Inc.)
Stephan R Mccandliss (Johns Hopkins University Baltimore, Maryland, United States)
Carl A Kotecki (Goddard Space Flight Center Greenbelt, Maryland, United States)
Regis P Brekosky (Goddard Space Flight Center Greenbelt, Maryland, United States)
Gang Hu (Science Systems and Applications (United States) Lanham, Maryland, United States)
Beth M Paquette (Goddard Space Flight Center Greenbelt, Maryland, United States)
Timothy M Miller (Goddard Space Flight Center Greenbelt, Maryland, United States)
Frederick H Wang (Goddard Space Flight Center Greenbelt, Maryland, United States)
Nicholas P Costen (Goddard Space Flight Center Greenbelt, Maryland, United States)
Samelys Rodriguez (Goddard Space Flight Center Greenbelt, Maryland, United States)
Vorachai Kluengpho (Science Systems and Applications (United States) Lanham, Maryland, United States)
Knute A Ray (Science Systems and Applications (United States) Lanham, Maryland, United States)
Eduardo J Aguayo (Newton LLC)
Kenneth M Simms (Adnet Systems (United States) Bethesda, Maryland, United States)
Meng-ping Chang (Goddard Space Flight Center Greenbelt, Maryland, United States)
Date Acquired
November 8, 2021
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: 35th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022)
Location: Tokyo
Country: JP
Start Date: January 9, 2022
End Date: January 13, 2022
Sponsors: Institute of Electrical and Electronics Engineers
Funding Number(s)
PROJECT: 600-18-7126
CONTRACT_GRANT: 80GSFC21M0002
CONTRACT_GRANT: 80GSFC18C0120
Distribution Limits
Public
Copyright
Portions of document may include copyright protected material.
Technical Review
Single Expert
Keywords
Electrostatic
MEMS actuator
microshutter array
multi-object spectroscopy

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