Acquisition Source
2230 Support
Document Type
Reprint (Version printed in journal)
Authors
Kaelyn Leake (Citadel Charleston, South Carolina, United States) Alexandria Carter (Citadel Charleston, South Carolina, United States) Hank Yochum (Citadel Charleston, South Carolina, United States) Date Acquired
April 24, 2023
Publication Date
October 3, 2022
Publication Information
Publication: Proceedings of SPIE
Publisher: Society of Photo-optical Instrumentation Engineers
Issue Publication Date: October 3, 2022
ISSN: 0277-786X
e-ISSN: 1996-756X
Funding Number(s)
CONTRACT_GRANT: 80NSSC20M0054
Distribution Limits
Public
Copyright
Use by or on behalf of the US Gov. Permitted.
Keywords
Nanoengineeringlayer by layerpatterningpolymer thin filmsionic self-assemblynanofabricationautomation