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Advancing Next Generation Microshutter Arrays for Future Astronomical Space-Based ObservatoriesThe main objective was to reduce front-to back run-out-error and minimize wafer bow. We focused on:
- DRIE recipe optimization
- Gas flows
- Etch timing
- Power changes
- Test of different substrates
- Pyrex
- Sapphire
- Test of wafer adhesives
Document ID
20230014234
Acquisition Source
Goddard Space Flight Center
Document Type
Poster
Authors
Regis Brekosky (Goddard Space Flight Center Greenbelt, Maryland, United States)
Date Acquired
September 29, 2023
Subject Category
Space Sciences (General)
Meeting Information
Meeting: Annual IRAD Poster Session & Innovator of the Year Award Ceremony
Location: Greenbelt, MD
Country: US
Start Date: November 15, 2023
Sponsors: Goddard Space Flight Center
Funding Number(s)
WBS: 295670.01.23.51.01
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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