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Metallization Scheme for 800 °C Silicon Carbide Microsystems
Document ID
20240004805
Acquisition Source
Glenn Research Center
Document Type
Presentation
Authors
Robert S Okojie
(Glenn Research Center Cleveland, United States)
Dorothy Lukco
(HX5, LLC)
Date Acquired
April 17, 2024
Subject Category
Metals and Metallic Materials
Electronics and Electrical Engineering
Aerodynamics
Meeting Information
Meeting: Materials Research Society (MRS) Spring Meeting
Location: Seattle, WA
Country: US
Start Date: April 22, 2024
End Date: April 26, 2024
Sponsors: Materials Research Society
Funding Number(s)
WBS: 109492.02.03.05.06.01
Distribution Limits
Public
Copyright
Public Use Permitted.
Technical Review
NASA Technical Management
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