Engineered Edge Effect Stress Redistribution in Suspended Thin Film Stacks for Flatness Control

This paper presents the systematic study of edge effect stresses and interaction between thin film stacks to achieve flat suspended thin film structures. Finite element modeling (FEM) was used for rapid analysis of support structures on microshutter array (MSA) shutter blades. The design application aims to flatten the blades to provide ultra-high contrast to optical detectors using MSAs as field masks. This is the first comprehensive study of microscopic surface feature edge effect and film-to-film stress interaction in micro electromechanical systems (MEMS). This study demonstrates flattening of thin film stacks by stress redistribution by induced shear force at the edge of strategically designed reinforcement structures.