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Nitrogen Plasma Instabilities and the Growth of Silicon Nitride by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition
External Source
jpl
Document Type
Other
Authors
Pool, F. S.
Date Acquired
October 26, 2026
Publication Date
January 1, 1996
Publication Information
Publication: NOT AVAILABLE
Publisher: UNKNOWN
DOI: http://hdl.handle.net/2014/25426
Distribution Limits
Public

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