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ScAlN/3C-SiC/Si platform for monolithic integration of highly sensitive piezoelectric and piezoresistive devices
External Source
chorus
Document Type
Accepted Manuscript
Authors
Afzaal Qamar
Hoang-Phuong Phan
Toan Dinh
Nam-Trung Nguyen
Mina Rais-Zadeh
Date Acquired
December 15, 2025
Publication Date
January 4, 2020
Publication Information
Publication: Applied Physics Letters
Publisher: AIP Publishing
Volume: 116
Issue: 13
ISSN: 0003-6951
e-ISSN: 1077-3118
DOI: 10.1063/5.0004943
Funding Number(s)
funding: DE200100238
funding: W911NF-16-1-0340
Distribution Limits
Public

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