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A nanochannel fabrication technique using chemical-mechanical polishing (CMP) and thermal oxidation
External Source
jpl
Document Type
Type not specified
Authors
Lee, C.
Yang, E. H.
Myung, N. V.
George, T.
Date Acquired
February 10, 2024
Publication Date
August 12, 2003
Publication Information
Publisher: UNKNOWN
DOI: http://hdl.handle.net/2014/37280
Distribution Limits
Public

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