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Direct Back-End Integration of III-V Single Crystalline Materials in CMOS via Growth for Active Integrated Photonic Components and 3-D Integrated Sensing Technologies
External Source
jpl
Document Type
Presentation
Authors
Greer, Frank F
Kapadia, Prof. Rehan
Dapkus, Prof. Dan
Sarkar, Dr. Debarghya
Chae, Hyun Uk
Gunapala, Sarath
Soibel, Alex
Masters, Dan
Date Acquired
February 10, 2024
Publication Date
November 4, 2020
Publication Information
Publisher: Pasadena, CA: Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2020
DOI: http://hdl.handle.net/2014/53627
Distribution Limits
Public

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