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Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics
External Source
chorus
Document Type
Accepted Manuscript
Authors
Patricio A. Gallardo
Brian J. Koopman
Nicholas F. Cothard
Sarah Marie M. Bruno
German Cortes-Medellin
Galen Marchetti
Kevin H. Miller
Brenna Mockler
Michael D. Niemack
Gordon Stacey
Edward J. Wollack
Date Acquired
October 26, 2026
Publication Information
Publication: Applied Optics
Publisher: Optica Publishing Group
Volume: 56
Issue: 10
Issue Publication Date: January 4, 2017
ISSN: 0003-6935
e-ISSN: 1539-4522
DOI: 10.1364/ao.56.002796
Funding Number(s)
funding: 1454881
funding: ECCS-1542081
Distribution Limits
Public

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