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Diffusion process modeling Technical summary report, Feb. - Aug. 1965Diffusion process modeling to improve silicon integrated device reliability
Document ID
19660008185
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Donovan, R. P. (Research Triangle Inst. Durham, NC, United States)
Date Acquired
August 3, 2013
Publication Date
August 1, 1965
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-70455
Report Number: NASA-CR-70455
Accession Number
66N17474
Funding Number(s)
CONTRACT_GRANT: NAS8-20058
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
SILICON
DIFFUSION
SEMICONDUCTOR DEVICE
RELIABILITY

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