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Breakdown in vacuum deposited thin film silicon monoxide capacitors Supplement to final reportThin film silicon monoxide capacitor vacuum deposition and intact removal from substrate to study breakdown characteristics
Document ID
19670002526
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Hayes, P. J. (PH.D. THESIS)
Date Acquired
August 3, 2013
Publication Date
August 1, 1966
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-79925
Report Number: NASA-CR-79925
Accession Number
67N11855
Funding Number(s)
CONTRACT_GRANT: NAS8-11279
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
THIN FILM
CAPACITOR
VACUUM DEPOSITION
SILICON OXIDE
ELECTRIC BREAKDOWN

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