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Improvement of laminar-flow equipment for microelectronic application Final report, 1 Jun. 1967 - 31 May 1968Laminar flow benches for particulate contamination control in air flow
Document ID
19690027034
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Rymarz, T. M. (IIT Research Inst. Chicago, IL, United States)
Date Acquired
September 2, 2013
Publication Date
March 10, 1969
Subject Category
Fluid Mechanics
Report/Patent Number
IITRI-C6114-12
NASA-CR-86217
Report Number: IITRI-C6114-12
Report Number: NASA-CR-86217
Accession Number
69N36412
Funding Number(s)
CONTRACT_GRANT: NAS12-552
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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