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The effects of dielectric overcoating on electromigration in aluminum interconnections.Dielectric overcoating effects on electromigration Al interconnections, showing dependence on thickness and surface passivation
Document ID
19690054900
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Schwartz, S.
Spitzer, S. M.
Date Acquired
August 5, 2013
Publication Date
April 1, 1969
Subject Category
Electronic Equipment
Meeting Information
Meeting: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, ANNUAL RELIABILITY OF PHYSICS SYMPOSIUM
Location: WASHINGTON, DC
Start Date: December 2, 1968
End Date: December 4, 1968
Sponsors: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
69A32889
Distribution Limits
Public
Copyright
Other

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