NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login
Back to Results
Furnace-tube contaminationContamination in furnaces for fabricating wafers, and cleaning procedures
Document ID
19700033071
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Heald, D. L. (California Univ. Santa Barbara, CA, United States)
Date Acquired
August 5, 2013
Publication Date
January 1, 1968
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-102836
Accession Number
70N42387
Funding Number(s)
CONTRACT_GRANT: NGR-05-010-041
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available