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Continuous discharge line source for the extreme ultravioletHigh intensity continuous gas discharge line source for extreme UV with low electromagnetic interference
Document ID
19710055148
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Bowyer, C. S.
Kumar, S.
Paresce, F.
Date Acquired
August 6, 2013
Publication Date
August 1, 1971
Subject Category
Instrumentation And Photography
Accession Number
71A35845
Funding Number(s)
CONTRACT_GRANT: NGR-05-003-278
Distribution Limits
Public
Copyright
Other

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