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Record 1 of 11714
Techniques for control of long-term reliability of complex integrated circuits. I - Reliability assurance by test vehicle qualification.
Author and Affiliation:
Van Vonno, N. W.(Harris Semiconductor, Melbourne, Fla., United States)
Abstract: Development of an alternate approach to the conventional methods of reliability assurance for large-scale integrated circuits. The product treated is a large-scale T squared L array designed for space applications. The concept used is that of qualification of product by evaluation of the basic processing used in fabricating the product, providing an insight into its potential reliability. Test vehicles are described which enable evaluation of device characteristics, surface condition, and various parameters of the two-level metallization system used. Evaluation of these test vehicles is performed on a lot qualification basis, with the lot consisting of one wafer. Assembled test vehicles are evaluated by high temperature stress at 300 C for short time durations. Stressing at these temperatures provides a rapid method of evaluation and permits a go/no go decision to be made on the wafer lot in a timely fashion.
Publication Date: Jan 01, 1972
Document ID:
19720051020
(Acquired Dec 04, 1995)
Accession Number: 72A34686
Subject Category: ELECTRONIC EQUIPMENT
Document Type: Conference Proceedings
Publication Information: (SEE A72-34676 17-09)
Publisher Information: United States
Meeting Information: Electronic Components Conference; 22nd; May 15-17, 1972; Washington, DC
Financial Sponsor: NASA; United States
Description: 4p; In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: Copyright
NASA Terms: AEROSPACE SYSTEMS; CIRCUIT RELIABILITY; INTEGRATED CIRCUITS; LARGE SCALE INTEGRATION; LONG TERM EFFECTS; TEST VEHICLES; AVIONICS; CONFERENCES; FABRICATION; MATRICES (CIRCUITS); METALLIZING; THERMAL STRESSES; WAFERS
Imprint And Other Notes: In: Electronic Components Conference, 22nd, Washington, D.C., May 15-17, 1972, Proceedings. (A72-34676 17-09) New York, Institute of Electrical and Electronics Engineers, Inc., 1972, p. 463-466. NASA-supported research.
Availability Source: Other Sources
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