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Experimental approaches to well controlled studies of thin-film nucleation and growth.Particular features and the performance of two experimental systems are described for quantitative studies of thin-film nucleation and growth processes including epitaxial depositions. System I consists of a modified LEED-Auger instrument combined with high-resolution electron microscopy. System II is a UHV electron microscope adapted for in-situ deposition studies. The two systems complement each other ideally, and the combined use of both can result in a comprehensive investigation of vapor deposition processes not obtainable with any other known method.
Document ID
19730027831
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Poppa, H.
Moorhead, R. D.
Heinemann, K.
(NASA Ames Research Center Moffett Field, Calif., United States)
Date Acquired
August 7, 2013
Publication Date
January 1, 1972
Publication Information
Publication: Nuclear Instruments and Methods
Volume: 102
Subject Category
Physics, Solid-State
Accession Number
73A12633
Distribution Limits
Public
Copyright
Other

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