Investigation of the sensitivity of ionization-type vacuum gauges

A quantitative analysis of a large and representative sample of available data has been made to determine the best criteria for predicting the relative sensitivities of ionization-type vacuum gauges to different gases. The molecular property of the gas that correlates best with relative sensitivity is the ionization cross section (eV). For high-pressure ionization gauges, a cross section evaluated at 2/3 of the accelerating potential of the gauge is the best choice. For Bayard-Alpert and triode gauges, any of three choices are of approximately equal value. These are 100 eV cross section values, maximum cross section value for each gas, and a cross section evaluated at 2/3 of the accelerating potential for each gauge. For the Alphatron gauge, cross section values in the range 5000-10,000 eV provide the best correlation.