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Record Details

Record 15 of 7133
Microcircuit failure analysis using the SEM. [Scanning Electron Microscopes]
Author and Affiliation:
Nicolas, D. P.(NASA Marshall Space Flight Center, Astrionics Laboratory, Huntsville, Ala., United States)
Abstract: The scanning electron microscope adds a new dimension to the knowledge that can be obtained from a failed microcircuit. When used with conventional techniques, SEM assists and clarifies the analysis, but it does not replace light microscopy. The most advantageous features for microcircuit analysis are long working distances and great depth of field. Manufacturer related failure modes of microcircuits are metallization defects, poor bonding, surface and particle contamination, and design and fabrication faults. User related failure modes are caused by abuse, such as overstress. The Physics of Failure Procedure followed by the Astrionics Laboratory in failure analysis is described, which is designed to obtain maximum information available from each step.
Publication Date: Jan 01, 1974
Document ID:
19750050817
(Acquired Dec 01, 1995)
Accession Number: 75A34889
Subject Category: ELECTRONICS AND ELECTRICAL ENGINEERING
Document Type: Conference Proceedings
Publication Information: (SEE A75-34851 16-33)
Publisher Information: United States
Meeting Information: Inventing the model of the future; Southeast Region 3 Conference; April 29, 1974-May 1, 1974; Orlando, FL
Financial Sponsor: NASA; United States
Description: 3p; In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: Copyright
NASA Terms: ELECTRON MICROSCOPES; ELECTRONIC EQUIPMENT TESTS; FAILURE ANALYSIS; MICROELECTRONICS; SEMICONDUCTOR DEVICES; ASTRIONICS; ELECTRICAL FAULTS; NONDESTRUCTIVE TESTS; SCANNING
Imprint And Other Notes: In: Inventing the model of the future; Proceedings of the Southeast Region 3 Conference, Orlando, Fla., April 29-May 1, 1974. (A75-34851 16-33) New York, Institute of Electrical and Electronics Engineers, Inc., 1974, p. 376-378.
Availability Source: Other Sources
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