A system for the study of molecular contamination

An experimental vacuum chambers was designed and fabricated to provide a wide range of experimental capability. This work chamber assembly (WCA) was conceived to establish the proof-of-principle of various techniques for studying the kinetics of contaminants and their effects. It incorporates the capability for depositing both optical and contaminant films on temperature-controlled samples, and for in-situ measurements of the vacuum ultraviolet reflectance. Ellipsometer optics are mounted on the chamber for film thickness determinations, and other features include access ports for radiation sources and instrumentation.