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SEM probe of IC radiation sensitivityScanning Electron Microscope (SEM) used to irradiate single integrated circuit (IC) subcomponent to test for radiation sensitivity can localize area of IC less than .03 by .03 mm for determination of exact location of radiation sensitive section.
Document ID
19780000541
Document Type
Other - NASA Tech Brief
Authors
Gauthier, M. K.
Stanley, A. G.
Date Acquired
August 9, 2013
Publication Date
March 1, 1979
Publication Information
Publication: NASA Tech Briefs
Volume: 3
Issue: 4
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
NPO-14350
Accession Number
78B10541
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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