Ion sheath effects on RF plasma probes - Experimental results in laboratory plasmas

Laboratory work dealing with the frequency characteristic of the plasma impedance of spherical and cylindrical electrode systems is reported. The influence of the ion sheath on various features of the impedance characteristic is emphasized. Those features are the series and parallel resonance as well as additional resonances due to the excitation of electroacoustic and cyclotron harmonic waves. The dependence of the series and parallel resonances on dc biasing leads to a method of determining the ion sheath capacity for a cylindrical electrode system. The obtained values agree fairly well with those obtained from a theoretical model for the density and potential distribution in the sheath of a cylindrical sensor aligned with a supersonic plasma flow. The amplitude of resonances due to excitation of longitudinal plasma waves (electroacoustic and cyclotron harmonic) is reduced or even vanishes for sufficiently negative dc bias. Positive bias first leads to an increased amplitude up to a certain dc bias value above which, however, the amplitude decreases again due to electron absorption at the sensor surface.