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CMOS/SOS processingReport describes processes used in making complementary - metal - oxide - semiconductor/silicon-on-sapphire (CMOS/SOS) integrated circuits. Report lists processing steps ranging from initial preparation of sapphire wafers to final mapping of "good" and "bad" circuits on a wafer.
Document ID
19790000431
Document Type
Other - NASA Tech Brief
Authors
Ramondetta, P.
(RCA Corp.)
Date Acquired
August 10, 2013
Publication Date
April 1, 1980
Publication Information
Publication: NASA Tech Briefs
Volume: 4
Issue: 3
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-25176
Accession Number
79B10431
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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