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An XPS study of the adherence of refractory carbide, silicide, and boride RF-sputtered wear-resistant coatingsRadio frequency sputtering was used to deposit refractory carbide, silicide, and boride coatings on 440-C steel substrates. Both sputter etched and pre-oxidized substrates were used and the films were deposited with and without a substrate bias. The composition of the coatings was determined as a function of depth by X-ray photoelectron spectroscopy combined with argon ion etching. Friction and wear tests were conducted to evaluate coating adherence. In the interfacial region there was evidence that bias may produce a graded interface for some compounds. Biasing, while generally improving bulk film stoichiometry, can adversely affect adherence by removing interfacial oxide layers. Oxides of all film constituents except carbon and iron were present in all cases but the iron oxide coverage was only complete on the preoxidized substrates. The film and iron oxides were mixed in the MoSi2 and Mo2C films but layered in the Mo2B5 films. In the case of mixed oxides, preoxidation enhanced film adherence. In the layered case it did not.
Document ID
19790037009
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Brainard, W. A.
(NASA Lewis Research Center Cleveland, OH, United States)
Wheeler, D. R.
(NASA Lewis Research Center Cleveland, Ohio, United States)
Date Acquired
August 9, 2013
Publication Date
December 1, 1978
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 15
Subject Category
Nonmetallic Materials
Accession Number
79A21022
Distribution Limits
Public
Copyright
Other

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