Production technology for high efficiency ion implanted solar cellsIon implantation is being developed for high volume automated production of silicon solar cells. An implanter designed for solar cell processing and able to properly implant up to 300 4-inch wafers per hour is now operational. A machine to implant 180 sq m/hr of solar cell material has been designed. Implanted silicon solar cells with efficiencies exceeding 16% AM1 are now being produced and higher efficiencies are expected. Ion implantation and transient processing by pulsed electron beams are being integrated with electrostatic bonding to accomplish a simple method for large scale, low cost production of high efficiency solar cell arrays.
Document ID
19790056987
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Kirkpatrick, A. R. (Spire Corp. Bedford, MA, United States)
Minnucci, J. A. (Spire Corp. Bedford, MA, United States)
Greenwald, A. C. (Spire Corp. Bedford, Mass., United States)
Josephs, R. H. (California Institute of Technology, Jet Propulsion Laboratory, Pasadena Calif., United States)