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Producing silicon continuouslyFluid-bed vaporization followed by chemical vapor deposition generates large, semiconductor-grade silicon particles. Method is economical, high-volume alternative to conventional batch-processing methods. Harvested chunks, extracted in cyclone separator, are about 0.5 to 1.3 centimeters in diameter. Process is not limited to polymer feedstock; it utilizes any halosilane intermediate used in silicon production.
Document ID
19800000537
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Ingle, W. M.
(Motorola, Inc.)
Rosler, R. S.
(Motorola, Inc.)
Thompson, S.
(Motorola, Inc.)
Date Acquired
August 10, 2013
Publication Date
April 1, 1981
Publication Information
Publication: NASA Tech Briefs
Volume: 5
Issue: 4
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-14796
Accession Number
80B10537
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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