A high frequency silicon pressure sensorTheoretical and design considerations as well as fabrication and experimental work involved in the development of high-frequency silicon pressure sensors with an ultra-small diaphragm are discussed. A sensor is presented with a rectangular diaphragm of 0.0127 cm x 0.0254 cm x 1.06 micron; the sensor has a natural frequency of 625 kHz and a sensitivity of 0.82 mv/v-psi. High-frequency results from shock tube testing and low-frequency (less than 50 kHz) comparison with microphones are given.
Document ID
19810048442
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Kahng, S. K. (Oklahoma, University Norman, Okla., United States)
Gross, C. (Pressure Systems, Inc. Hampton, Va., United States)