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Gauge calibration system based on piston manometerAn unbaked calibration system is described that permits absolute calibration with a piston manometer in the range 0.0002 to 6 Pa, with a probable error of 5 microPa + 0.8%, or in the range 0.00008 to 0.02 Pa, with a probable error of 2 microPa + 1%. Procedures and techniques that permit this performance are detailed. For hot-cathode ion gauges, the magnitudes of systematic corrections for envelope temperature and grid current are also indicated.
Document ID
19810064546
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Warshawsky, I.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 11, 2013
Publication Date
August 1, 1981
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 19
Subject Category
Instrumentation And Photography
Accession Number
81A48950
Distribution Limits
Public
Copyright
Other

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