NASA Logo, External Link
Facebook icon, External Link to NASA STI page on Facebook Twitter icon, External Link to NASA STI on Twitter YouTube icon, External Link to NASA STI Channel on YouTube RSS icon, External Link to New NASA STI RSS Feed AddThis share icon
 

Record Details

Record 40 of 44
RF Sputtering of Gold Contacts On Niobium
Author and Affiliation:
Barr, D. W.(University of Virginia)
Abstract: Reliable gold contacts are deposited on niobium by combination of RF sputtering and photolithography. Process results in structures having gold only where desired for electrical contact. Contacts are stable under repeated cycling from room temperature to 4.2 K and show room-temperature contact resistance as much as 40 percent below indium contacts made by thermalcompression bonding.
Publication Date: Mar 01, 1983
Document ID:
19820000233
(Acquired Nov 04, 1995)
Accession Number: 82B10233
Subject Category: FABRICATION TECHNOLOGY
Report/Patent Number: NPO-15624
Document Type: NASA Tech Brief
Publication Information: NASA Tech Briefs; p. P. 104; (ISSN 0145-319X); 7; 1
Publisher Information: United States
Financial Sponsor: NASA; United States
Organization Source: Jet Propulsion Lab., California Inst. of Tech.; Pasadena, CA, United States
Description: In English
Distribution Limits: Unclassified; Publicly available; Unlimited
Rights: No Copyright
NASA Terms: DEPOSITION; ELECTRIC CONTACTS; GOLD COATINGS; NIOBIUM; SPUTTERING; THIN FILMS
Availability Source: National Technology Transfer Center (NTTC), Wheeling, WV
› Back to Top
Find Similar Records
NASA Logo, External Link
NASA Official: Gerald Steeman
Site Curator: STI Program
Last Modified: August 17, 2011
Contact Us