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RF Sputtering of Gold Contacts On NiobiumReliable gold contacts are deposited on niobium by combination of RF sputtering and photolithography. Process results in structures having gold only where desired for electrical contact. Contacts are stable under repeated cycling from room temperature to 4.2 K and show room-temperature contact resistance as much as 40 percent below indium contacts made by thermalcompression bonding.
Document ID
19820000233
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Barr, D. W.
(University of Virginia)
Date Acquired
August 10, 2013
Publication Date
March 1, 1983
Publication Information
Publication: NASA Tech Briefs
Volume: 7
Issue: 1
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-15624
Accession Number
82B10233
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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