Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kendall, B. R. F. (Pennsylvania State University University Park, PA, United States) Date Acquired
August 10, 2013
Publication Date
February 1, 1982
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 20
Accession Number
82A21967
Distribution Limits
Public