NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Predicting radiation sensitivity of polymersRecently two independent applications have emerged for highly radiation-sensitive polymers: as resists for production of microelectronic circuitry and as materials to record the tracks of energetic nuclear particles. The relief images used for masking in resist materials are generated by radiation-induced differential dissolution rates, whereas the techniques used in recording nuclear particle tracks employ differential etching processes, that is, development by a chemical etchant that actually degrades the polymer. It is found that the sensitivity of materials to these very different processes is related to their gamma-ray scission efficiency. This correlation provides a predictive capability.
Document ID
19820045345
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Osullivan, D.
(California Univ. Berkeley, CA, United States)
Price, P. B.
(California Univ. Berkeley, CA, United States)
Kinoshita, K.
(California, University Berkeley, CA, United States)
Willson, C. G.
(IBM Research Laboratory San Jose, CA, United States)
Date Acquired
August 10, 2013
Publication Date
April 1, 1982
Publication Information
Publication: Electrochemical Society
Subject Category
Nonmetallic Materials
Accession Number
82A28880
Funding Number(s)
CONTRACT_GRANT: NSF PHY-80-24128
CONTRACT_GRANT: NGR-05-003-376
Distribution Limits
Public
Copyright
Other

Available Downloads

There are no available downloads for this record.
No Preview Available