Soft X-ray and XUV imaging with a charge-coupled device /CCD/-based detector

A soft X-ray/XUV imaging camera which uses a thinned, back-illuminated, all-buried channel RCA CCD for radiation sensing has been built and tested. The camera is a slow-scan device which makes possible frame integration if necessary. The detection characteristics of the device have been tested over the 15-1500 eV range. The response was linear with exposure up to 0.2-0.4 erg/sq cm; saturation occurred at greater exposures. Attention is given to attempts to resolve single photons with energies of 1.5 keV.