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Heterogeneous decomposition of silane in a fixed bed reactorHeterogeneous decomposition of silane in a fluidized bed offers an attractive route for the low-cost production of silicon for photovoltaic application. To obtain design data for a fluid bed silane pyrolysis reactor, deposition experiments were conducted in a small-scale fixed bed apparatus. Data on the decomposition mode, plating rate, and deposition morphology were obtained in the temperature range 600-900 C. Conditions favorable for heterogeneous decomposition with good deposition morphology were identified. The kinetic rate data showed the reaction to be first order with an activation energy of 38.8 kcal/mol, which agrees well with work done by others. The results are promising for the development of an economically attractive fluid bed process.
Document ID
19820054096
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Iya, S. K.
(Union Carbide Corp. Tonawanda, NY, United States)
Flagella, R. N.
(Union Carbide Corp. Tonawanda, NY, United States)
Dipaolo, F. S.
(Union Carbide Corp. Tonawanda, NY, United States)
Date Acquired
August 10, 2013
Publication Date
July 1, 1982
Publication Information
Publication: Electrochemical Society
Subject Category
Inorganic And Physical Chemistry
Accession Number
82A37631
Funding Number(s)
CONTRACT_GRANT: JPL-954334
Distribution Limits
Public
Copyright
Other

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