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The combined effects of Fe and H2 on the nitridation of siliconIn view of the support offered by previous work for the suggestion that Fe may affect alpha-Si3N4 formation and microstructural development, a two-part study was conducted to differentiate the effects of H2 and Fe in, first, the nitridation of pure and of Fe-containing powder in N2 and N2-4% H2, and then the nitridation of (1 1 1) Si single crystal wafers with and without Fe powder on the surface. The degree of nitridation is most strongly affected by H2 at 1200 C, but by Fe at 1375 C, where Fe-containing samples in either atmosphere were almost completely nitrided. While neither H2 nor Fe alone changed the ratio of alpha-Si3N4 to beta-Si3N4, the combination of H2 and Fe increased it at both temperatures.
Document ID
19820059389
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Shaw, N. J. (NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 10, 2013
Publication Date
August 1, 1982
Publication Information
Publication: Journal of Materials Science Letters
Volume: 1
Subject Category
NONMETALLIC MATERIALS
Distribution Limits
Public
Copyright
Other